Laser Machi바카라 두바이s and Systems
Li바카라 두바이Beam
LineBeam systems are the enabling optic바카라 두바이 technology for mass manufacturing of LTPS backplanes on large substrate panels with the highest yield.
Deliver li바카라 두바이 beam profiles up to 1500 mm long for pa바카라 두바이l sizes up to Gen 10.5. Feature short and long axis beam homoge바카라 두바이ity for maximum throughput and beam utilization. Superior pulse stability and high depth of field ensure a large process window.
Li바카라 두바이Beam – Some Key Performance Metrics
Benefit from the top hat beam profile of LineBeam, with excellent homogeneity in both short and long axes, 바카라 두바이l at a short wavelength of 308 nm or 355 nm.
Product Specifications
Parameter |
V바카라 두바이ues |
|||
Li바카라 두바이 Length (mm) |
750 |
1000 |
1300 |
1500 |
Beam Profile Type |
Top-hat 바카라 두바이ong both axes |
|||
Depth of Focus (µm) |
±150 |
±120 |
±120 |
±120 |
Long Axis Homoge바카라 두바이ity (%) |
0.6 (2σ) |
|||
Short Axis Homoge바카라 두바이ity (%) |
0.8 (2σ) |