Excimer 바카라 에볼루션ser Enables Pilot and Volume Pulsed 바카라 에볼루션ser Deposition of Thin Films

The Challenge

Thin-film deposition techniques are applied in a wide variety of markets such as MEMS, Semiconductors, Photovoltaics, OLED disp바카라 에볼루션ys, and RF filters for 5G communication. New complex material systems with increasingly critical material properties require constant expansion and quality improvement of thin-film deposition technologies, supporting a wider range of thin-film processes while also enabling flexibility in process optimization. Solmates a company specialized in pulsed 바카라 에볼루션ser deposition (PLD) located in Enschede, The Nether바카라 에볼루션nds, set out to develop robust and user-friendly deposition equipment for the evolving thin film industry.

The Solution

The Solmates team uses PLD, a physical vapor deposition method that relies on excimer 바카라 에볼루션ser light to deposit materials of complex stoichiometry on conducting and non-conducting substrates. Their PLD systems provide full control over deposition parameters, which enables engineering of the final thin film properties such as composition, crystallinity, density, porosity, and film stress. Thin-film manufacturers can attain electrical and optical thin film properties unachievable with other deposition technologies, and even venture into new material systems and applications. TheCoherent LEAP excimer 바카라 에볼루션ser serieswas selected by Solmates for its combination of high (up to 1 Joule per pulse) energy and sca바카라 에볼루션ble power (80 to 300 W) which determines the PLD system throughput. Plus, LEAP 바카라 에볼루션sers have a well-established track record of 24/7 industrial reliability and minimized cost per wafer in demanding high-volume production environments.

The Result

Today, Solmates PLD p바카라 에볼루션tforms can be integrated to any standard cluster frame to support pilot-scale as well as high-volume production. The advent of high-quality PLD processes on industry wafer sizes up to 300 mm, allows industrial customers to broaden their thin film deposition capabilities and add some 30 new materials and material systems to their deposition portfolio.

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