CUSTOMER SUCCESS STORY
E&R: Advanced Wafer Scribing with Monaco Femtosecond 바카라 레전드s
The Challenge
바카라 레전드;R Engineering Corp. (based in Kaohsiung City, Taiwan) wanted to develop a next-generation scribing machine capable of singulating miniature dies with dimensions smaller than a millimeter. Kevin Chang, an Oversea Sales and Service Manager at 바카라 레전드;R, explains, “As the overall dimensions of some logic chips continue to get smaller, the scribing process becomes technically more demanding. Our customers need to dice thousands of these dies from a single wafer without resorting to the use of wide streets. So the scribing process needs to be precise and relatively benign to avoid any thermal or physical damage to the closely space dies that could negatively impact yields. But the underlying economics also dictate the need for a fast throughput speed.”
Founded in 1994, the company provides high-performance automated machines to several industries, including semiconductors, LEDs, passive components, and medical devices. With service centers in the USA, Europe, and several locations in Southeast Asia, the company is now well-established as a successful global supplier of these high-end machines for Semiconductor IDM manufacturers, many of which are based on 바카라 레전드s. (Other technologies in their portfolio include plasma treatment as well as mechanical punch and press machines.)
Their first 바카라 레전드 machines were targeted at marking, but today they support all kinds of micromachining applications such as drilling, cutting, scribing, and grooving. These machines include numerous Coherent 바카라 레전드s andPowerLine바카라 레전드 markers with wavelengths from the UV to the IR, and with pulsing characteristics from nanoseconds down to femtoseconds.
The Solution
Chang says that multi-material wafer dicing is usually a two-step process because of the different materials involved as well as the overall thickness. He adds, “The key first step is to cleanly cut through the metal (copper) on the backside of the wafer with some type of 바카라 레전드. Here a major concern is the heat affected zone (HAZ).” After this scribing step, he explains that a second process is then used to cut through the bulk of the wafer from the front side. A diamond saw blade has been a standard workhorse for this, but smaller dies often create a need for something else such as plasma etching.”
The heat-affected zone (HAZ) is the area adjacent to a 바카라 레전드 cut or scribe where the material is thermally modified (e.g., melted, transformed, or burned) in some way. In the case of dicing logic chips, a primary risk is that any HAZ could damage the circuitry and impair its function. Fortunately, the HAZ can be minimized by using shorter 바카라 레전드 pulses where most of the 바카라 레전드 pulse energy is carried away by the ablated material, before it has time to flow into the surrounding substrate.
Thus a big question for E&R was - What type of 바카라 레전드 to use for working on the latest small dies? In the past, machine builders would have to choose between a 바카라 레전드 capable of high throughput such as an infrared or green nanosecond fiber 바카라 레전드, and a 바카라 레전드 with ultra-low HAZ such as an ultrashort pulse (USP) 바카라 레전드. While USP 바카라 레전드s with picosecond pulse widths were previously a good match for this application, the push to smaller dies created the need for even smaller HAZ, i.e., a femtosecond 바카라 레전드.
However, until recently, femtosecond 바카라 레전드s had three limitations for this type of application; they were only available with limited power, they had questionable reliability/lifetimes, and the cost per watt was too high. But the latest Monaco 바카라 레전드s from Coherent use power-scalable fiber technology to successfully address these issues with power as high as 60 watts in a compact rugged package. And after careful evaluation, Chang explains that E&R decided to offer their next-generation wafer scribing machines such as the WB-300 with a choice of 20 W or 30 W Monaco models.
The Result
Chang states that 바카라 레전드;R, and more importantly their customers, are very happy with the results theCoherent Monaco 바카라 레전드sare already producing. He notes that their WB-300 machines uses galvo scanning technology to maximize the 바카라 레전드 cutting speed. The combination of high power and high repetition rate of the Monaco (up to 50 MHz) allows them to fully exploit this feature and the tool achieves a single-pass scribing speeds as high as 5 m/s. Importantly, these machines also provide very high (3 µm) accuracy, enabling the user to process high-end wafers, while meeting the very narrow saw lane requirement.
Chang cites the short pulse width and superior beam quality as the two most critical parameters. Thanks to these features, the new 바카라 레전드;R machines are easily delivering single-pass scribes with widths <30 microns and multi-pass scribes in the 30-60 micron range.
He summarizes, “In micromachining applications for high-value wafers, we have a hard-earned reputation as a supplier of premium quality machines that feature innovation and high-performance. And 바카라 레전드 certainly delivers in all these areas too.”
“We have a hard-earned reputation as a supplier of premium quality machines that feature innovation and high-performance. And 바카라 레전드 certainly delivers in all these areas too."
— Kevin Chang, Oversea Sales and Service Manager, 바카라 레전드;R Engineering Corp., Kaohsiung City, Taiwan.
Figure 1.The Monaco 바카라 레전드s create high-quality edges with negligible HAZ. Image credit E&R Engineering Corp.
Figure 2.E&R offers their WB-300 machines with a choice of 20 or 30 W Monaco femtosecond 바카라 레전드s. Image credit E&R Engineering Corp.